Thermo Scientific™ Helios 5 Hydra UX DualBeam

It combines the new, innovative multiple ion species PFIB column with the monochromated Thermo Scientific Elstar SEM Column to provide the most advanced focused ion- and electron-beam performance.

Key Benefits

• Largest application space with unique ion source delivering four fast, switchable ion species: Xe, Ar, O, N
• Highest quality Ga+ free TEM and APT sample preparation with Xe, O or Ar thanks to the new PFIB column enabling 500 V final polishing and delivering superior performance at all operating conditions
• Fastest and easiest, automated, multisite in situ and ex situ TEM sample preparation and cross-sectioning using optional AutoTEM 5 Software
• Highest throughput and quality statistically relevant 3D characterization, cross-sectioning and micromachining using next-generation 2.5 μA Plasma FIB column
• Access high-quality, multi-modal subsurface and 3D information with precise targeting of the region of interest using optional Auto Slice & View 4 (AS&V4) Software
• Shortest time to nanoscale information for users with any experience level with SmartAlign and FLASH technologies
• Reveal the finest details using the best-in-class Elstar Electron Column with high-current UC+ monochromator technology, enabling sub-nanometer performance at low energies
• The most complete sample information with sharp, refined and charge-free contrast obtained from up to six integrated in-column and below-the-lens detectors
• Most advanced capabilities for electron and ion beaminduced deposition and etching on DualBeam systems with optional MultiChem or GIS Gas Delivery Systems
• Precise sample navigation tailored to individual application needs thanks to the high stability and accuracy of the 150 mm Piezo stage and optional in-chamber Nav-Cam Camera
• Artifact-free imaging based on integrated sample cleanliness management and dedicated imaging modes such as SmartScan and DCFI Modes