Electron Channeling Contrast Imaging Performed by ZEISS GeminiSEM 500

Electron channeling contrast imaging (ECCI) is a technique for quantitative characterization of deformation structures in scanning electron microscopy (SEM). Relative orientation of crystalline lattice and incident electron beam influence back scattered electrons. ECCI makes use of this. ECCI in SEM is especially useful for imaging crystallographic defects such as dislocations, stacking faults and twin boundaries and thus starts to have an impact on materials science. This application note describes the electron channeling contrast imaging of crystalline defects using ZEISS GeminiSEM 500.