Optimizing Three Dimensional Electron Microscopy Results at Low kV

Over the past several years, a new generation of three dimensional electron microscopy (3DEM) tools has been developed in the Scanning Electron Microscope. These new techniques are capable of imaging at spatial resolutions over an order of magnitude better than optical microscopy. This application note demonstrates the optimization of images taken at low accelerating voltages using the Gatan back cattered electron detector.