Semiconductor mapping in transmission electron microscopy

Elemental analysis of semiconductors is typically difficult due to strong overlaps of X-ray lines between commonly used elements and low concentrations of dopants. Not only are concentrations of dopants small but their X-ray lines often overlap with other materials used in semiconductor processing. In this application note, Oxford Instruments NanoAnalysis shows how AZtecTEM solves these overlaps to achieve an accurate elemental analysis.