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SU8700

High-Resolution Schottky VP FE-SEM

Hitachi High-Tech Europe

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Equipped with a 150mm sample airlock as standard, the SU8700 offers high sample throughput even for larger samples and a constantly clean sample chamber environment for low-contamination, high-resolution imaging. In addition, the sample chamber can be opened and evacuated again in a matter of minutes to insert accessories. The sample stage can be moved 110mm in X and Y directions. An integrated colour camera enables image-based navigation. There are plenty of connection options for 2 x EDX, EBSD, STEM, inert gas sample transfer, plasma cleaner and other accessories are available.

Product features:

  • Durable and stable Hitachi Schottky field emitter with up to 200nA probe current
  • Brilliant imaging performance - without the need for a decelerating field on the sample - from 100V (10V option) up to 30kV acceleration voltage. EDX analysis and high-resolution imaging with all detectors are possible at 6mm working distance
  • Reliable automatic functions such as adaptation to user defined optical conditions or 2D autofocus and autostigmator enable practical use of the superior equipment capabilities
  • A 150mm diameter sample airlock is supplied as standard. It enables fast specimen exchange while keeping the chamber vacuum clean

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