Dektak® 8 Advanced Development Profiler
VEECO Instruments Inc.The Dektak® 8 Advanced Development Profiler combines high repeatability, low-force sensor technology, and advanced 3D data analysis for surface characterization of MEMS, semiconductors and other thin/thick films. The system provides 7.5 angstrom, 1 sigma step height repeatability and a vertical range of up to 1mm. Its overhead gantry design enables scan lengths to 200mm, for planarity and flatness measurements.